MSc in MicroElectroMechanical Systems (MEMS)
Information and Syllabus
Electronic technologies have evolved to the extent that modern device features are measured in nanometers. As a result of this, many new device concepts, fabrication methods and characterisation techniques have emerged.
Nanotechnology has become a key area of research within ECS, and internationally it is an increasingly important feature of modern electronics manufacture and research in industry. Our recently completed state-of-the-art Nanofabrication centre provides the backdrop for three different MSC programmes that we offer in this area: Nano-electronics and Nano-technology, Micro-electro mechanical systems (MEMS), and Bio-Nanotechnology. All three degrees will offer substantial training and experiments in our clean room facility.
Although these three degree programmes sound very different, they are all strongly dependent on fabrication techniques on both micro- and nano-scale. They hence share around 50% of the taught part with the other 50% allowing for your specification. On the Nanofabrication centre web page, you can see the differences between the three degrees in detail. The degrees all provide an excellent platform for further research in either industry or academia (such as PhD student in the Nano or MSD group).
MicroElectroMechanical systems (MEMS) exploits techniques developed by the microelectronics industry to produce micron-scale mechanical devices such as accelerometers and micro-pumps on silicon wafers.
Several types of MEMS device are already very well established in the market place, but we expect massive growth in this field. Among the most exciting developments are in the bioMEMS areas where medical diagnostics and the concept of ‘lab-on-a-chip’ are important new markets.
MEMS is a very multidisciplinary field that requires knowledge of electronics design, fabrication technologies, measurement systems and mechanics. To reflect these requirements this programme of study includes microelectronics device fabrication and design modules as well as specialized options on Microsystems Technology.
The syllabus is updated every year but this list will give you a rough guide to modules offered at present.
Semester 1
- ELEC6011 Introduction to MEMS (Compulsory)
- ELEC6021 Research Methods (Compulsory)
- ELEC6100 Lab on a Chip (Compulsory)
- ELEC6108 Microfabrication (Compulsory)
- ELEC3025 Integrated Circuit Design (Optional)
- ELEC3042 Introduction to BioNanotechnology (Optional)
- ELEC6009 Nanoelectronic Devices (Optional)
Semester 2
- COMP6033 Independent Research Review (Compulsory)
- ELEC6105 Instrumentation and Sensors (MSc) (Compulsory)
- ELEC6107 MEMS Laboratory Project (Compulsory)
- ELEC6111 MEMS Sensors & Actuators (Compulsory)
- ELEC3019 Photonic Devices (Optional)
- ELEC3024 Nanofabrication and Characterisation (Optional)
- ELEC6104 Bio-Nanotechnology Laboratory Project (Optional)
- ELEC6106 Logic & Quantum Devices (Optional)
- ELEC6109 Nanoelectronics Laboratory Project (Optional)
- ELEC6110 Memory & Spintronic Devices (Optional)
- ELEC6112 Biosensors (Optional)
Semester 3/Summer
- ELEC6003 MSc Project (Compulsory)